Silicon AnalyticaGlossary · Lithography
What is DUV (ArF immersion) lithography?
Deep-ultraviolet (DUV) lithography prints chip patterns with ultraviolet light of longer wavelengths than EUV. ArF immersion tools use 193-nanometre light and place a layer of water between the lens and the wafer to sharpen the image.
Why it matters for investors
DUV tools still expose most layers on most chips, including many layers on leading-edge processors whose most critical layers use EUV. Demand comes from both advanced fabs and the much larger base of mature-node capacity.
Because DUV systems are sold to a wider range of customers, including chipmakers in China, export rules and mature-node spending cycles can move DUV sales independently of EUV.
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General educational explanation. Information only, not investment advice.