Chart 20 · AI trends

EUV was 47% of ASML's net system sales in 2025 (€11.6B), up from 31% in 2019

FY2019 – FY2025

Calculated DUV = ArF immersion + ArF dry + KrF + i-line; from 2024 EUV = 0.33 NA (NXE) + 0.55 NA (EXE); EUV share = EUV ÷ total net system sales.
Calculated ≈US$ in the table and tooltips at one approximate monthly rate (Federal Reserve G.5, Oct 2026); the chart axis stays in euros.

View sources (3)

ASML Form 20-F (Annual Report 2025) · Notes, net system sales per technology · FY2024, FY2025 · published 25 Feb 2026
ASML 2023 Annual Report based on US GAAP · Notes: disaggregation of revenue, net system sales per technology (€ millions) — 2023 report labels EUV as NXE · FY2021, FY2022, FY2023 · published 14 Feb 2024
ASML 2021 Annual Report based on US GAAP · Notes: disaggregation of revenue, net system sales per technology (€ millions) · FY2019, FY2020 · published 9 Feb 2022

ASML sold €11.6B (≈US$13.0B) of EUV systems in 2025, 47% of its net system sales; DUV systems brought €12.0B (≈US$13.5B).

In 2019 EUV was €2.8B, 31% of system sales.

Net system sales exclude Installed Base Management (service and upgrades), which ASML reports separately.

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